| 摘要 |
PURPOSE:To produce the stamper having a small thickness distribution by setting the thickness of a conductive film to be clad on a resist master disk larger at the outer peripheral end than at the inner peripheral end within the resist master disk prior to electrocasting. CONSTITUTION:Ni, silver, gold, etc., are used as the material of the conductive film to constitute the stamper master disk. The conductive film is formed by a physical thin film forming method, such as vacuum vapor deposition method or sputtering method. The thickness of the conductive film can be made into, for example, >=500Angstrom at the inner peripheral end of the stamper master disk and into, for example, <=2000Angstrom at the outer peripheral end of the stamper original plate. Namely, the thickness distribution is provided on the conductive film, by which the conductive film is made thicker at the outer peripheral end than at the inner peripheral end. A film thickness correcting plate or the like is placed in some cases near the center of a chamber 4 of a target 1 as the method for providing the distribution at the film thickness in such a manner. The thickness of the conductive film of the stamper master disk is controlled in such a manner, by which the stamper having the small thickness distribution is produced. |
