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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH0582477(A)
申请公布日期
1993.04.02
申请号
JP19910240897
申请日期
1991.09.20
申请人
HITACHI LTD
发明人
WATANABE SEIICHI
分类号
C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/34
主分类号
C23F4/00
代理机构
代理人
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