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经营范围
发明名称
METHOD OF FORMING ETCHING MASK
摘要
申请公布号
JPH0582487(A)
申请公布日期
1993.04.02
申请号
JP19910270039
申请日期
1991.09.20
申请人
SONY CORP
发明人
MATSUSHITA TAKESHI
分类号
H01L21/302;H01L21/3065;H01L21/3205
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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