| 摘要 |
<p>PURPOSE:To move the plurality of wafers at the same time from a wafer carrier to a wafer boat where wafers are placed at small pitches. CONSTITUTION:Between supporting plates 32, 33 which are installed on a moving hand 3, spacers 50 which can be inserted between the plurality of wafers W on a wafer boat are located. When an air cylinder 40 does not work, the spacers 50 are separated from each other by a compression spring and a parallel pitch is large. When the air cylinder 40 works, the spacers 50 are brought very close together and the arrangement pitches become small. The plurality of wafers W on the wafer boat are all held simultaneously by a wafer supporting plate 64 and are moved to a wafer carrier. By this method, the plurality of wafers can be moved at the same time from the wafer carrier to the wafer boat where wafer are arranged at small pitches.</p> |
