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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0582517(A)
申请公布日期
1993.04.02
申请号
JP19910238409
申请日期
1991.09.18
申请人
FUJITSU LTD
发明人
TAMAKI MOTONARI
分类号
H01L21/3205;H01L23/52;H01L23/522;H01L23/538
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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