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发明名称
ION IRRADIATION DEVICE
摘要
申请公布号
JPH0582075(A)
申请公布日期
1993.04.02
申请号
JP19910270061
申请日期
1991.09.20
申请人
NISSIN ELECTRIC CO LTD
发明人
ANDO YASUNORI
分类号
C23C14/00;C23C14/54;H01J37/20;H01J37/317;H01J37/32;H01L21/265
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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