Thinly coated substrate forming T-shaped structure for testing characteristics of thin film material - has right-angled bend in each residual section of thin film supporting central limb of T

摘要

The structure (4) is formed in a region (3) of the substrate (1) which carries a thin film (2), removed from selected areas (5-7) to leave two lateral portions (8,9) incorporating 90-deg. bends, and a central portion (10). The lateral portions (8,9) support the centre (10) flexibly but exert next to no influence on variations in its length which consequently give a very precise measure of internal stresses. In an alternative embodiment, two such T-structures are formed back-to-back and thinly coupled. USE/ADVANTAGE - E.g. for determining thermal expansion coefficients or breaking elongation. Max. variations of geometrical dimensions can be detected with greater accuracy in consequence of normal stresses.