发明名称 PROCESS FOR MANUFACTURING INTEGRATED OPTICAL COMPONENTS USING SILICON MASK
摘要 A process for the production of an integrated optical circuit in a glass body by ion exchange between certain regions of the glass body and a metallic salt with the use of a mask defining the regions where the ion exchange occurs, characterized in that the mask comprises a layer of silicon.
申请公布号 AU2454192(A) 申请公布日期 1993.04.01
申请号 AU19920024541 申请日期 1992.09.17
申请人 CORNING INCORPORATED 发明人 ALAIN BEGUIN;JEAN-CLAUDE PRESOTTO;PASCALE LABORDE
分类号 C03C17/22;C03C21/00;G02B6/12;G02B6/13;G02B6/134 主分类号 C03C17/22
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