PRODUCTION METHOD FOR OXIDE SUPERCONDUCTOR FILM.

摘要

A production method for a high quality oxide superconductor film. This method can control easily a film formation rate and a film composition, and produces an oxide superconductor film safely, economically and homogeneously over a wide range. A precursor consisting of an amorphous metal is produced deposited on a substrate by vacuum evaporation of one or more elements R (selected from rare earth metals including yttrium and lanthanoid series), Ba and Cu under a metal state. This precursor is heated for oxidation and crystallization while it is shielded from the air.