| 摘要 |
1. The miniature flow sensor having a silicon base and a membrane, consisting in that in the base (1), an opening (2) is located and partitioned with a multilayer membrane (3), whereas at least one of the membrane (3) layers are made of silicon nitride, and moreover on the membrane surface (3), a piezoresistor (4) is fitted with external electric contacts (5), and also in the membrane (3), at least one flow window (6) is located.<IMAGE>
|
