SLIDER UNITS FOR INFORMATION RECORDING DEVICES AND METHODS OF MAKING THEM

摘要

A slider unit having a reading/reproducing head (4), for use floating over the surface of an information recording disk, has a slider body having a flying height sensor (15), float surfaces on the underside thereof to generate a lift force, and a device (40) for controllably adjusting the lift force generated at the undersurface. Device (40) may be for example a piezoelectrically or electrostatically controllable valve layer positioned over a vent communicating between the upper surface of the slider and opening into a recess (21) for generating a negative lift component at the underside of the slider. The slider body is made from a ceramics base portion (3) and a semiconductive insert portion (20) e.g. of silicon or photosensitive glass, on which the adjustment device (40) can be formed using microfabrication techniques such as deposition and etching. A step (22) for forming a negative pressure generating recess (21) may also be etched in the semiconductive insert (20). By using these techniques, mass-production of the slider units is facilitated.