| 摘要 |
PURPOSE:To facilitate mass production of sensors by finding conditions of a mass part and a punching groove to ensure ease of operation of the mass part. CONSTITUTION:Silicon 1 is worked and a punching part groove 6 is etched to form a mass part 4 and a cantilever 5. To construct a stopper and upper and lower electrodes 9, the electrodes 9 are arranged on 2 a glass plate and below 3 the glass plate to be mounted on and below the silicon 1 by an anode junction. In this manner, when acceleration is applied as acceleration sensor of three-layer structure, the mass part 4 formed at the tip of the cantilever 5 set at the center is put into operation. Here, as a gap is small, normally in the order of mum between the mass part 4 operating as mobile electrode and the electrodes 9, the flow of air moving vertically passing through the punching groove 6 affects greatly as damper. Here, when the ratio between the area of the mass part 4 and the area of the punching part groove 6 is held below 1.0, smooth operation is accomplished. |
