| 摘要 |
A positively operating radiation-sensitive mixture comprising a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, and as a photoactive component a polyfunctional alpha -diazo- beta -keto ester of the general formula I <IMAGE> (I) in which R1 denotes an aliphatic, cycloaliphatic or araliphatic or aromatic radical having 4 to 20 carbon atoms, in which individual CH2 groups can be replaced by oxygen or sulfur atoms or by <IMAGE> or NH groups and/or contain keto groups, X denotes an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical having 2 to 22 carbon atoms, in which individual CH2 groups can be replaced by oxygen or sulfur atoms or by the groups -NR2-, -C(O)-O-, -C(O)-NR2-, -C(O)- <IMAGE> -NR2-C(O)-NR3-, -O-C(O)-NR2-, -C(O)- <IMAGE> or -O-C(O)-O-, or CH groups can be replaced by <IMAGE> in which R2 and R3 independently of one another represent hydrogen or an aliphatic, carbocyclic or araliphatic radical, m denotes an integer from 2 to 10 and n denotes an integer from 0 to 2, wherein m-n is >/=2, is described. The radiation-sensitive mixture is particularly suitable for exposure using radiation of wavelength 190 to 300 nm.
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