| 发明名称 |
BULK OVERLAP CAPACITANCE TESTING METHOD |
| 摘要 |
The method measures the bulk overlap capcitance by measuring the total capacitance, the field oxide capacitance per unit area, and the gate oxide capacitance respectively after forming the cross region of a number of gates and active arrayes on the P substrate. The method is adequate esp. to the device having narrow width. |
| 申请公布号 |
KR930002450(B1) |
申请公布日期 |
1993.03.30 |
| 申请号 |
KR19900005127 |
申请日期 |
1990.04.13 |
| 申请人 |
GOLDSTAR ELECTRON CO., LTD. |
发明人 |
KIM, NAM - JONG;KIM, KI - HONG;SONG, MIN - IL |
| 分类号 |
H01L21/66;G01R27/00;(IPC1-7):H01L21/66;G01R31/26 |
主分类号 |
H01L21/66 |
| 代理机构 |
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