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发明名称
METHOD OF DETERMINING COMPLETION OF PROCESS ON ION ETCHING OF FILMS
摘要
申请公布号
RU1806419(C)
申请公布日期
1993.03.30
申请号
SU19914923949
申请日期
1991.02.25
申请人
RIZHSKIJ TEKHNICHESKIJ UNIVERSITET
发明人
DEKHTYAR YURIJ D,SU;KVELDE YURIS A,SU;KUNITSYN ANATOLIJ V,SU;MARKELOVA GALINA N,SU;NOSKOV VLADIMIR A,SU;SAGALOVICH GENNADIJ L,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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