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发明名称
SURFACE MICROSCOPE
摘要
申请公布号
JPH0579833(A)
申请公布日期
1993.03.30
申请号
JP19910241098
申请日期
1991.09.20
申请人
HITACHI LTD
发明人
HOSAKA SUMIO;HASEGAWA TAKESHI;HOSOKI SHIGEYUKI;HONDA YUKIO;HAZAKI EIICHI
分类号
G01B21/30;G01Q30/02;G01Q30/08;G01Q30/16;G01Q30/20;G01Q60/10;G01Q60/24;G01Q60/50
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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