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发明名称
THIN-FILM CHEMICAL SENSOR WITH ELECTRICAL HEATING ELEMENT
摘要
申请公布号
JPH0580011(A)
申请公布日期
1993.03.30
申请号
JP19910245757
申请日期
1991.09.25
申请人
NIKON CORP
发明人
USHIO KAJIRO;MIYAYAMA MASARU;YANAGIDA HIROAKI
分类号
G01N27/12
主分类号
G01N27/12
代理机构
代理人
主权项
地址
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