SEMICONDUCTOR ACCELERATION SENSOR AND AIR BAG SYSTEM

摘要

PURPOSE:To obtain a semiconductor acceleration sensor which can satisfy any of conditions of impact resistance and mass producibility by allowing the sensor to adapt sufficiently to the detection for large acceleration as given in the collision of vehicles. CONSTITUTION:Single crystal silicon 1 is worked to form a frame part 2 (fixed part) and a mass part 3, which are linked together with an integral combination body (elastic support body) of a beam part 4 and a diaphragm part 6. The beam part 4 is built by forming a part of the diaphragm part 6 thick. A distortion is detected with a piezo-electric resistance element 6 formed with the diffusion of the beam part 4 as associated with the displacement of the mass part 3. Or, the mass part 3 is made as mobile electrode and a fixed electrode is arranged as opposed thereto to capture a displacement of the mass part 3 responding to the acceleration from a change in the electrostatic capacitance between the electrodes.