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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0578834(A)
申请公布日期
1993.03.30
申请号
JP19910240797
申请日期
1991.09.20
申请人
SHIBAURA ENG WORKS CO LTD
发明人
KINOKIRI KYOJI;KATO NAOKI
分类号
C23C14/34;C23C14/04;C23C14/35;G11B7/26
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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