METHOD FOR MAKING AN ALUMINIUM COATING BY ARC-DISCHARGE INDUCTION ION-PLATING

摘要

An ion plating apparatus for aluminum film comprises a vacuum chamber (1), a substrate (6), evaporation sources (3), a shutter (5), filaments (4), and an ionization electrode (2). The coating method of aluminum film on the substrate by arc discharged ion plating comprises (a) using graphite or nitride compound boat as evaporating sources, (b) applying electric current of above 40 A to filaments and voltage of above 60 V to the ionization electrode to allow the current of above 5 A, (c) charging a substrate with the current of 200 mA and raising the ionization rate of evaporated aluminum.