DEVICE FOR PRODUCING THIN FILM,申请号JP19910139463-传众专利搜索

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发明名称	DEVICE FOR PRODUCING THIN FILM
摘要
申请公布号	JPH0578826(A)	申请公布日期	1993.03.30
申请号	JP19910139463	申请日期	1991.05.16
申请人	NIPPON STEEL CORP	发明人	IMAFUKU MUNEYUKI;SHIMADA HARUO;ITO WATARU
分类号	C23C14/24;C23C14/50;C23C16/46	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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