| 摘要 |
PURPOSE:To provide an X-Y table device wherein a bonder such as a wire bonder or the like can be moved in the X- and Y-directions at high speed and with high accuracy. CONSTITUTION:This device is composed of the following: a base member 1; an X-Y direction movement device 30 which moves the base member 1 in the X- and Y-directions; a movement table 5 which is mounted on the base member 1 via an air bearing 6 so as to be freely slid and which supports a bonder 20; and linear motors 8, 9 which are installed around the movement table 5 and which move the movement table 5 in the X- and Y-directions. The base member 1 is coupled to the movement table 5 by using a spring member 3 which can be freely bent in the X- and Y-directions. |
