摘要 |
PURPOSE:To obviate the formation of defects on the rear surface of a stamper and fine ruggedness on the front surface of the stamper. CONSTITUTION:A photosensitive resin 2 is inserted between a a base plate 3 and the stamper 1. A stamper base 8 consists of a mounting base 4, a double- coated adhesive tape 5, an elastic material 6, and a vinyl sheet 7. Since the elastic material 6 is disposed on the rear surface of the stamper 1, the uniform disk substrate is formed even if there are the unequal thickness of the stamper, the projecting parts of the rear surface of the stamper, etc. |