| 发明名称 |
SEMICONDUCTOR MARKER |
| 摘要 |
|
| 申请公布号 |
JPH0574880(A) |
申请公布日期 |
1993.03.26 |
| 申请号 |
JP19910235816 |
申请日期 |
1991.09.17 |
| 申请人 |
NEC YAMAGATA LTD |
发明人 |
MOTOKI HIROSHI |
| 分类号 |
G01R31/28;H01L21/66 |
主分类号 |
G01R31/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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