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发明名称
METHOD FOR FORMATION OF THIN FILM IN SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0574711(A)
申请公布日期
1993.03.26
申请号
JP19910236307
申请日期
1991.09.17
申请人
OKI ELECTRIC IND CO LTD
发明人
HASHIMOTO KEIICHI
分类号
C23C14/58;H01L21/203;H01L21/3205
主分类号
C23C14/58
代理机构
代理人
主权项
地址
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