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发明名称
UP/DOWN MOVEMENT GUIDANCE DEVICE FOR STAGE
摘要
申请公布号
JPH0572484(A)
申请公布日期
1993.03.26
申请号
JP19910238292
申请日期
1991.09.18
申请人
NIKON CORP
发明人
MIZUNO JIRO
分类号
G02B21/24;G02B21/26
主分类号
G02B21/24
代理机构
代理人
主权项
地址
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