| 摘要 |
PURPOSE:To precisely and minutely position a moving body at high precision by arranging a lamination piezoelectric element in the direction normal to the movement direction thereof, expanding it and repeating operation for moving the moving body. CONSTITUTION:A lamination piezoelectric element for a chuck 4 is arranged in the direction normal to the movement direction thereof, and a pressure element 5 and the element 4 are brought into contact with a table chuck 3. Negative voltage is applied to a lamination piezoelectric element for feed 6 for the purpose of contraction. Next, positive voltage is applied to the element 4 to convert it and a moving table 1 is chucked with the pressure element 5 and the chuck 3 attached to the edge thereof. In the state the positive voltage is applied to a piezoelectric element 6, and the chuck 3 and the table 1 are moved in the direction of an arrow mark. And the applied voltage is released to separate the table 1 from the chuck 3. Furthermore, the negative voltage is applied to the piezoelectric element 6 to make an initial condition. This operation is repeated and the table 1 is moved to an objective position. The position of the table 1 is measured by the use of a laser displacement gage. |
