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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0574740(A)
申请公布日期
1993.03.26
申请号
JP19910234753
申请日期
1991.09.13
申请人
FUJITSU LTD
发明人
KANEKO SACHIYO
分类号
C23F4/00;H01L21/02;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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