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经营范围
发明名称
WAFER PROBING DEVICE
摘要
申请公布号
JPH0574885(A)
申请公布日期
1993.03.26
申请号
JP19910232618
申请日期
1991.09.12
申请人
NEC YAMAGATA LTD
发明人
IGARASHI KINICHI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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