| 摘要 |
PURPOSE:To allow the formation of the optical waveguide having good crystallinity on a semiconductor single crystal substrate and the integration of the optical waveguide and an electronic circuit. CONSTITUTION:An epitaxial insulator film 2 is formed on the semiconductor single crystal substrate 1 and an epitaxial dielectric film 3 having the refractive index higher than the refractive index of the insulator is formed on the insulator film 2. Then, the optical waveguide having the good crystallinity is easy produced on the semiconductor single crystal substrate 1 and further, the integrated circuit integrated with the optical waveguide and the electronic circuit can be materialized as a small-sized device. |
