发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce the ROM area of a semiconductor device in which a ROM is built and, further, reduce a manufacturing TAT after a ROM code. CONSTITUTION:A polycrystalline silicon film 3a which is to be a gate electrode is insulated with a silicon nitride film 5 and silicon oxide films 7 which are uniformly left on the side surfaces by etching back and the source and drain regions 8a of a specific transistor are connected to each other with a high melting point metal film 11.
申请公布号 JPH0575067(A) 申请公布日期 1993.03.26
申请号 JP19910234191 申请日期 1991.09.13
申请人 NEC CORP 发明人 TSUKUDA FUMIAKI
分类号 H01L27/112;H01L21/8246 主分类号 H01L27/112
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