发明名称 BONDING APPARATUS
摘要 PURPOSE:To perform a stable bonding operation by preventing the play of a horn, which is caused when the horn is rocked. CONSTITUTION:Thus apparatus is provided with the following: a horn 1 which holds a pressure tool 2 at its tip part; a revolving shaft 6 for the horn 1; a bearing 7 for the shaft 6; and a linear motor 4 which rocks the horn 1 in the up-and-down direction around the shaft 6. A rotor yoke 5 for the linear motor 4 is coupled to the shaft 6; magnets 8 installed on the outer face of the rotor yoke 5 are faced with a stator yoke 9; the shaft 6 is brought into pressure contact with bearing 7 by means of the magnetic force of the magnets 8 and the stator yoke 9; the horn 1 is rocked in the up-and-down direction.
申请公布号 JPH0574839(A) 申请公布日期 1993.03.26
申请号 JP19910232830 申请日期 1991.09.12
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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