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发明名称
ETCHING SYSTEM
摘要
申请公布号
JPH0574754(A)
申请公布日期
1993.03.26
申请号
JP19910234213
申请日期
1991.09.13
申请人
NEC KYUSHU LTD
发明人
ISHIJIMA TSUYOSHI
分类号
H01L21/304;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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