摘要 |
PURPOSE:To provide, a jig effective for obtaining a high accurate optical device, in which dispersion of the thickness distribution of plate thickness of a board and film thickness of a thin film is small, and provide a method using this jig. CONSTITUTION:A jig for grinding an optional device consists of a base jig, a holding jig 8 provided with multiple holding holes 9a, 9b supported in parallel with the base jig, and fixing jigs 7a, 7b for fixing a body to be grinded, which are housed inside of the holding holes 9a, 9b freely to move vertically. A structure for fixing with line-contact of the fixing jigs 7a, 7b to the inner wall of the holes, at least, at two parts of the holding holes 9a, 9b in the axial direction or with surface-contact is provided in the jig for grinding optical device. A high accurate optical device can be manufactured stably by polishing with this jig. |