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发明名称
METHOD AND APPARATUS FOR QUALITY MEASURE DRIVEN PROCESS CONTROL
摘要
申请公布号
US5196997(A)
申请公布日期
1993.03.23
申请号
US19910644170
申请日期
1991.01.22
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
KURTZBERG, JEROME M.;LEVANONI, MENACHEM
分类号
G05B13/02;B65G61/00;G05B15/02;G05B21/02;G06Q50/00;H01L21/027;H01L21/30;H01L21/66
主分类号
G05B13/02
代理机构
代理人
主权项
地址
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