| 摘要 |
PURPOSE:To produce a ceramic setter taking advantage of a ceramic fiber. CONSTITUTION:A raw liq. contg. a mixture of 3-20wt.% ceramic fiber, 15-60wt.% alumina-based powder, 30-70wt.% of an inorg. low-expansion-coefficient powder having <3X10<-6>/ deg.C thermal expansion coefficient, 0.1-5wt.% magnesia powder and 2-20wt.% of a water-soluble or dispersible high molecular compd. is formed into a sheet. The obtained wet sheet is dried to obtain an original sheet, which is fired at >=1000 deg.C. The obtained ceramic setter has high strength and resistance to heat and spalling and is lightweight, thin and highly economical. Since a large setter is easily produced, the setter is cut, and many small setters are efficiently produced at a time. |
