| 摘要 |
<p>PURPOSE:To separately control the air atmosphere in plural chamber by using a pressure-swinging adsorption separation-type air cleaner. CONSTITUTION:Air is sucked from plural chambers 20, 21 and 22 and cleaned to increase the oxygen concn., and the oxygen-enriched air is supplied to each chamber by pressure-swinging adsorption separation-type air cleaners 11 and 12. In this case, an oxygen analyzer 3 is set in the chambers 20, 21 and 22, the amt. of oxygen-enriched air to be supplied to the chambers 20, 21 and 22 is controlled by a flow control valve 4 provided to the feed line from the air cleaners to the chambers 20, 21 and 22 in accordance with the output signal from the analyzer 3, and the capacity of compressor 6 furnished to the air suction line 31 extending from the chambers 20, 21 and 22 to the air cleaners 11 and 12 is controlled by a control means 13 based on the total value of output signals from the analyzer 3.</p> |
