发明名称 Semiconductor memory device with recessed array region
摘要 A semiconductor memory wherein a memory cell region having a plurality of memory cells and a relatively high altitude above the surface of semiconductor substrate is formed at a recessed part of the semiconductor substrate having the recessed part and a projected part, and wherein a peripheral circuit region having a comparatively low altitude from the surface of the semiconductor substrate is formed at the projected part of the semiconductor substrate.
申请公布号 US5196910(A) 申请公布日期 1993.03.23
申请号 US19910650999 申请日期 1991.02.04
申请人 HITACHI, LTD. 发明人 MORIUCHI, NOBORU;YAMAGUCHI, YOSHIKI;TANAKA, TOSHIHIKO;HASEGAWA, NORIO;KAWAMOTO, YOSHIFUMI;KIMURA, SHIN-ICHIRO;KAGA, TORU;KURE, TOKUO
分类号 H01L21/8242;H01L27/105;H01L27/108 主分类号 H01L21/8242
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