| 发明名称 |
PROCESS OF COLLECTING NF3 PURIFIED FROM MIXTURE OF NF3 AND CF4 |
| 摘要 |
<p>A method is disclosed for the kinetic separation of gas mixtures using gas-solid chromatography. More specifically, a method is disclosed for the kinetically driven gas-solid chromatographic separation of NF3 from CF4 in significant volumes over a specific class of adsorbents to recover NF3 at high purities, such as 99.99% NF3.</p> |
| 申请公布号 |
JPH0570112(A) |
申请公布日期 |
1993.03.23 |
| 申请号 |
JP19920061104 |
申请日期 |
1992.02.17 |
| 申请人 |
AIR PROD AND CHEM INC |
发明人 |
FUIRITSUPU BURUUSU HANDAASON;CHIYAARUZU GAADONAA KUU;DONARUDO ERUSON FUOURAA;MONTOFUOODO SUTOTSUKUREI BENSON |
| 分类号 |
B01J20/18;B01D53/02;B01D53/04;B01J20/281;C01B9/08;C01B21/083 |
主分类号 |
B01J20/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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