| 摘要 |
PURPOSE:To install a plate-shaped chip in a substrate at high density by providing a loading body for having the chip laid or loaded on a moving table, so that the body can be freely raised, and by providing a raising means of the loading body between a receiving position and a delivery position. CONSTITUTION:A chip 100 is stored in a tube 1 which is a chip supply part, in a condition that the chip is laid down, while a tunnel 3 is provided in a seat 2. The chip 100 in the tube 1 slides in the tunnel 3, and is delivered to a moving table 4. As the chip supply part, a tape feeder, for example, can be used, besides the tube 1. The moving table 4 on which the chip 100 is loaded on a loading body 31, is moved to a delivery position, from a receiving position. By raising the loading body 31 therebetween, the chip 100 on the loading body 13 is also raised, and the raised chip 100 is picked up by a transfer head, and is put on a substrate. The moving table 4 is installed in an arm 6 so that the table is freely rotated, by a pin 7. |
