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发明名称
LOW ABERRATION FIELD EMISSION ELECTRON GUN
摘要
申请公布号
US5196707(A)
申请公布日期
1993.03.23
申请号
US19910671425
申请日期
1991.03.04
申请人
ETEC SYSTEMS, INC.
发明人
GESLEY, MARK A.
分类号
H01J3/02;H01J37/073;H01J37/08;H01J37/12;H01J37/305;H01L21/027
主分类号
H01J3/02
代理机构
代理人
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地址
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