发明名称 POSITIONING DEVICE
摘要 PURPOSE:To reduce the position dislocation and attitude change of a driven body due to locking after positioning in a positioning device formed in such a way as to lock the driven body after positioning it. CONSTITUTION:In a positioning device for positioning a driven body in the driving direction, driving transmission systems 9, 12, 13 for driving the driven body 1 are provided with lock mechanism 8, 17 so as to lock the driving transmission systems and thereby to lock the driven body 1 indirectly. There are further provided a pressurized air supply means, a vacuum exhaust means, and a switching means for switching these means.
申请公布号 JPH0569265(A) 申请公布日期 1993.03.23
申请号 JP19910248520 申请日期 1991.09.03
申请人 CANON INC 发明人 KUBO TADAYUKI;OSANAI EIJI
分类号 B23Q3/18;B23Q5/54;G05D3/10;H01L21/027;H01L21/30 主分类号 B23Q3/18
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