| 摘要 |
PURPOSE:To obtain a displacement transducer having stable characteristics against the variation in temperatures by forming a distortion transmitting member with an alumina single crystal material, and forming distortion sensing bodies on the alumina single crystal material so as to form one body. CONSTITUTION:A distortion transmitting member 11 which is fixed to a support (not shown in the Figure) as a mode of a cantilever is formed by a alumina single crystal material. While, distortion sensing bodies 12, which sense the transmitted distortion and convert it to an electrical signal, is formed on the top and bottom surfaces of the distortion transmitting member 11 so as to form one body by epitaxially growing silicon. Lead wires 13 are connected so as to form a resistor bridge that includes the distortion sensing bodies 12. |
