| 摘要 |
PURPOSE:To provide a substrate checking device which optically checks a substrate with only an objective hole filled up even in the case that through holes and via holes different having different diameters exist together. CONSTITUTION:This substrate checking device is provided with a reflected light camera 5 which picks up the image of illumination for reflected light and the image of the reflected light, a transmitted light camera 6 which picks up the image of transmitted light illumination illuminating the substrate to be checked from the rear face and the image of the transmitted light, a picture extracting means 52 which extracts the picture of a specific pattern by degeneracy and expansion of the output of the transmitted light camera 6, a picture synthesizing means 53 which synthesizes the picked-up image of the reflected light camera and the output picture of the picture extracting means S2, and a pattern checking means 54 which executes the pattern check of the synthesized picture. Thus, only holes having an objective diameter are filled up in the synthesized picture. |
