摘要 |
PURPOSE:To obtain an acceleration sensor which can detect the accelerations in the biaxial directions which are intersected at right angles with one sensor having the simple structure and can perform self-diagnosis by utilizing acceleration detecting terminals without providing special detecting terminals for self- diagnosis. CONSTITUTION:Strip-shaped electrodes 71-78 are formed at the positions obtained by dividing the outer surface into eight equal parts. A piezoelectric ceramic circular cylinder 61 wherein specified polarization processing is performed is provided. The strip-shaped electrodes are divided into two sections as detecting parts 71-78 and driving parts 81 and 82. Of the strip-shaped electrodes at the detecting parts, four electrodes 71, 73, 75 and 77 are made to be the grounding terminals, a pair of the electrodes 72 and 76 facing to each other through the piezoelectric circular cylinder are made to be the first output terminals and a pair of the remaining electrodes 74 and 78 are made to be the second output terminals. An electrode 80 which is connected to the grounding terminals 71, 73, 75 and 77 is made to be the common grounding electrode. Two electrodes 81 and 82 at the driving parts are made to be the input terminals. |