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发明名称
MANUFACTURE OF MULTILAYER WIRING MEMBER AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0567689(A)
申请公布日期
1993.03.19
申请号
JP19910227633
申请日期
1991.09.09
申请人
HITACHI LTD
发明人
ONOZAWA KAZUNORI
分类号
H01L21/318;H01L21/768;H01L23/522
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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