ASHING METHOD AND ASHING APPARATUS,申请号JP19910225837-传众专利搜索

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发明名称	ASHING METHOD AND ASHING APPARATUS
摘要
申请公布号	JPH0567593(A)	申请公布日期	1993.03.19
申请号	JP19910225837	申请日期	1991.09.05
申请人	MATSUSHITA ELECTRON CORP	发明人	UCHIDA HIROBUMI
分类号	H01L21/30;H01L21/027;H01L21/302;H01L21/3065	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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