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经营范围
发明名称
WASHING APPARATUS
摘要
申请公布号
JPH0564776(A)
申请公布日期
1993.03.19
申请号
JP19910250224
申请日期
1991.09.04
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
KAMIKAWA YUJI
分类号
B08B3/08;H01L21/00;H01L21/02
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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