GAS SPRAYER AND EXHAUSTING MODULE

摘要

The gas injector is provided at the groove part (12) located at the back of a reactor (10) composed of anodic oxidation aluminum or stainless steel, by a flange (24) and an adapter (23,25) so that process gas inflows via a number of gas injecting holes. Exhaust space (31) the type of which is slot is provided on an exhaust plate (30) attached to the front body (10) of the reactor to, be opposite to the gas injecting hole. The three exhaust holes are drilled under the exhaust space to be connected with an multiple branched exhaust tube (33) so that residual gas can be exhausted through the exhaust module.