MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19910229349-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH0567724(A)	申请公布日期	1993.03.19
申请号	JP19910229349	申请日期	1991.09.10
申请人	HITACHI LTD;HITACHI YONEZAWA ELECTRON CO LTD	发明人	SUZUKI MASARU;TAKASHIMA KAZUHISA;WATANABE KENJI;HAGIWARA TAKATOSHI;TABATA KATSUHIRO
分类号	H01L21/56;H01L23/28;H01L23/50	主分类号	H01L21/56
代理机构		代理人
主权项
地址

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